http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200918792-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f101d084de4edfe92fbade3affe1d832 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16J15-0887 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16J15-08 |
| filingDate | 2008-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e11c6112e015c130f1adec2154ca317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b60f15a9e56ae672e07d8ea8e081297 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e63294dfadbf08ee26e4ec81af4d5b67 |
| publicationDate | 2009-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200918792-A |
| titleOfInvention | Sealing structure |
| abstract | A sealing structure having excellent sealing ability for sealing between two members, such as quartz (or ceramic) and metal, used for devices that produce semiconductors and liquid crystals and having different linear expansion coefficients. The sealing structure can maintain high sealing performance even if heat cycles are repeated, does not cause breakage of a mating member made of quartz (or ceramic), and has long service life. A plate-like brittle member (1) made of quartz is sandwiched and held in an elastically isolated state by a metal main seal (10) and a metal sub seal (20). |
| priorityDate | 2007-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.