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filingDate 2008-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2009-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200918658-A
titleOfInvention Polishing composition and method utilizing abrasive particles treated with an aminosilane
abstract The inventive method comprises chemically-mechanically polishing a substrate with an inventive polishing composition comprising a liquid carrier, a cationic polymer, an acid, and abrasive particles that have been treated with an aminosilane compound.
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