http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200912553-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e7fbfb28cac93c9f23e316d057c6dec |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03B27-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2008-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfe574765d5d45673d364651933bd0d1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9086fec1013c3b9a011a87103bbaf6bf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_416ee165c8eafe76e810c74a45815252 |
| publicationDate | 2009-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200912553-A |
| titleOfInvention | Vacuum suction frame for ultraviolet rays exposure apparatus |
| abstract | The present invention relates to a vacuum suction frame for an ultraviolet exposure apparatus, and more particularly, to a vacuum suction frame, which is used in an ultraviolet exposure apparatus for forming a circuit pattern on a printed circuit board in order to increase an exposure speed of the exposure apparatus and to reduce defects of products in an exposure process. A vacuum suction frame for an ultraviolet exposure apparatus according to the present invention comprises a Mylar film layer, an acryl plate and a fixing frame. The fixing frame fixes the Mylar film layer to one surface of the fixing frame and fixes the acryl plate to a top surface of the Mylar film layer. Further, in the vacuum suction frame, the fixing frame preferably fixes the acryl plate to the top surface of the Mylar film layer so that the acryl plate is spaced apart from the top surface of the Mylar film by a predetermined distance. According to the present invention, the operation that an operator would have spread a Mylar film layer using a rod in an exposure process is not required any more, so that the operational speed can be increased and defects of products due to the inexperience of the operation can be prevented from occurring. |
| priorityDate | 2007-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.