http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200910229-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f063b8222ec3c8e746a415e7f364473 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-32266 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-32267 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P90-02 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B19-418 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06Q10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F17-30 |
| filingDate | 2007-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a36b010823250f4c31f04c6e09eab91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d3f1f041df76b9fc25ce77db09fb604 |
| publicationDate | 2009-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200910229-A |
| titleOfInvention | Method and system for auto-dispatching lots in photolithography process |
| abstract | A method and a system for auto-dispatching lots in photolithography process are provided. In the present method, a prioritized lot list is established according to a working status of a plurality of photolithography equipment. Then, a processable lot with the highest priority from the lot list is selected and a relative process background information is used for determining a photolithography operation type. Finally, the selected lot is dispatched according to the photolithography operation type. The present invention dispatches the lot with the appropriate dispatching rule according to the process background information of the lot. As a result, the quality of the photolithography process can be ensured so as to increase the throughput, and the labor overhead can be reduced to achieve the purpose of production cost reduction. |
| priorityDate | 2007-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513873 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67815 |
Total number of triples: 19.