http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200908130-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 |
| filingDate | 2008-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a52c78287772e6465bdc60e7a992b33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a669e03acc73cdb36cf622559cb6a1e |
| publicationDate | 2009-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200908130-A |
| titleOfInvention | Polishing composition and method for manufacturing semiconductor integrated circuit device |
| abstract | Disclosed is a polishing composition used for polishing an object surface during production of a semiconductor integrated circuit device, which enables an insulating layer having a buried metal interconnect to have a flat surface. Also disclosed is a semiconductor integrated circuit device having a highly planarized multilayer structure. Specifically disclosed is a composition for chemical mechanical polishing for polishing an object surface to be polished in a semiconductor integrated circuit device, which contains one or more oxidants selected from the group consisting of hydrogen peroxide, ammonium persulfate and potassium persulfate, abrasive grains, an alicyclic resin acid, a basic compound and an inorganic acid. The polishing compound has a pH within the range of 8-12. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I612128-B |
| priorityDate | 2007-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 112.