| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bd3db587e4ed4157681e419a4f7741e8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F30-367 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F17-50 |
| filingDate |
2008-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32243a2ed6b1491cf012f7aaf683352b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff2a62c26f67b6ac2021be65f0345c32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e89474585e318d7d5964a217b223cf0c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc9f0b570dba9c22ed2628599e7abfa8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41235136b50501c5c28d425b915758ca |
| publicationDate |
2009-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200907731-A |
| titleOfInvention |
Method and apparatus for creating a gate optimization evaluation library |
| abstract |
The invention can provide a method of processing a substrate using Gate-Optimization processing sequences and evaluation libraries that can include gate-etch procedures, COR-etch procedures, and evaluation procedures. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109659266-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109659266-B |
| priorityDate |
2007-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |