http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200907121-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e2e91fe0e2b9cd6fbbdebe5a7d9045f |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B15-00 |
filingDate | 2008-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f9e9335a34b375e394e7f23f8cb6ee5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e378ccd5c579ec139950ff113bce3629 |
publicationDate | 2009-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-200907121-A |
titleOfInvention | Single crystal pulling apparatus and method |
abstract | The present invention provides a single crystal pulling apparatus and method, which improves a structure of a cooling piping system constituting a cooler, so as to avoid dangers accompanying a burst of the cooling piping system. The single crystal pulling apparatus 1 possesses a cooler 10 for cooling the single crystal being pulled. The cooler 10 contains a cooling piping system 100. The cooling piping system 100 that cooling water flows is divided into a plurality of systems along the direction of the single crystal pulled. A rupture disk 60 at a top chamber 50 is capable of coping with a leak of water from one of the plurality of systems of the cooling piping system 100. |
priorityDate | 2007-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.