http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200904616-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2023-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2011-00 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-38 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-62 |
filingDate | 2008-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_860cae9cee31c69ffc75666d6b04ceed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1420884800a8cfcb483baeabc109878a |
publicationDate | 2009-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-200904616-A |
titleOfInvention | Imprint mold and method for production thereof |
abstract | Disclosed are: an imprint mold which is characterized in that a coating layer provided on the surface of the mold is hardly detached from the mold; and a method for producing the imprint mold. Specifically disclosed are: an imprint mold comprising a main body of the mold and a coating layer comprising a mold release agent and provided on the surface of the main body, wherein the mold release agent comprises a compound represented by the formula (1); and a method for producing the imprint mold.; Wherein R represents Rf-X-, provided that two R's are the same as each other; Rf represents a perfluoroalkyl group; X represents a group composed of one or more units selected from -(OC3F6)-, -(OC2F4)- and -(OCF2)-, wherein the total number of the units is 1 or more; Y represents an organic group; n represents a number of 2 to 10 on average; Z represents -Si(R<1>)m(R<2>)3-m; R<1> represents a hydroxy group or a hydrolyzable group; R<2> represents a hydrogen atom or a hydrocarbon group; and m represents a number of 1 to 3. |
priorityDate | 2007-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 81.