http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200902836-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F05D2260-607 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02T50-60 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04D19-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04D29-701 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F01D25-00 |
| filingDate | 2008-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_786a3d48aff89e7d8d2b6200f9d53bb8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2a2d3b2962540e24d65160ace2b9744 |
| publicationDate | 2009-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200902836-A |
| titleOfInvention | Turbo-molecular pump, substrate processing apparatus, and method for suppressing attachment of depositions to turbo-molecular pump |
| abstract | The invention provides a turbo-molecular pump (18), which can restrain attachment of depositions onto component parts thereof and is used for discharging deposition-causing gas from a chamber (11), including: a rotor (37) of a rotating shaft (36) along the exhaust stream; a casing (38) holding the rotor (37); multiple rotating wings (39) protruding from the rotor (37) relatively to the rotating shaft (36) vertically; and multiple static wings (40) protruding from the casing (38) relatively to the rotating shaft (36) vertically.; Multiple rotating wings (39) are divided into multiple rotating wing groups (41); multiple static wings (40) are divided into multiple static wing groups (42); each rotating wing group (41) and each static wing group (42) are collocated mutually along the rotating shaft (36), supplying the gas at more upstream opening of exhaust stream relative to the rotating wing group (41) at lowest downstream side to deposition-suppressing gas with Ar molecule. |
| priorityDate | 2007-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.