http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200902612-A

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filingDate 2007-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18b9bd0e965b4441f4ff12086c1a0337
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publicationDate 2009-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200902612-A
titleOfInvention Compositions for polishing aluminum/copper and titanium in damascene structures
abstract The invention provides a chemical-mechanical polishing composition for polishing a substrate. The polishing composition comprises an oxidizing agent, calcium ion, an organic carboxylic acid, and water, wherein the polishing composition has a pH of 1.5 to 7. The invention further provides a method of chemically-mechanically polishing a substrate with the aforementioned polishing composition.
priorityDate 2006-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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