http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200901383-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f063b8222ec3c8e746a415e7f364473 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 |
| filingDate | 2007-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b51974c2c615b65f2b2e764078a153f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a9a2e97e74130a0eeb75ba88f64b2ab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d4c78ccb2b9705723dc16cd27ed68f7 |
| publicationDate | 2009-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200901383-A |
| titleOfInvention | Capacitors and methods for fabricating the same |
| abstract | A capacitor comprises a dielectric layer, a trench formed in the dielectric layer, a first conductive layer formed in the trench, a plurality of conductive plugs formed over the first conductive layer, a capacitor layer formed over the conductive plugs and the first conductive layer, and a second conductive layer formed over the capacitor layer. The first conductive layer is conformably formed over a sidewall and a bottom surface of the dielectric layer exposed by the trench. The conductive plugs are formed with an interval therebetween. The capacitor electrically insulates the second conductive layer with the conductive plugs and the first conductive layer. A method for fabricating the above capacitor is also provided. |
| priorityDate | 2007-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 201.