| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_399d433982220f3203f7f18db8c9aa28 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06722 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07371
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2889
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07314 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2008-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1496cd256f7c84d0572cdc7b1df34c75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fda2ebc0ac3dcc1f251082af3780f4a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d548a583eab00f7a4ace3c28d577fa47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28fee8eb4e4dd3523026bfd9b8d1386d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cc02385af1240cb481968e9940879e2 |
| publicationDate |
2008-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200848749-A |
| titleOfInvention |
Probe card |
| abstract |
Provided is a probe card capable of attaining flatness and parallelism with high accuracy with respect to a predetermined reference surface. In the probe card of the present invention, force acting points Q, at which a force from a leaf spring 17 for pressing a vicinity of an edge portion of a surface of a probe head 15 having a plurality of probes protruding therefrom in a direction toward a substrate over the whole peripheral portion thereof is applied to the probe head 15, are positioned in an inner side of an outer edge of the probe head 15, and force acting points P, at which a force from a retainer 16 for pressing a vicinity of an edge portion of a space transformer 14 over the whole peripheral portion in a direction toward the substrate is applied to the space transformer 14, are positioned in an inner side of an outer edge of the space transformer 14. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I788149-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I491885-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I512298-B |
| priorityDate |
2007-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |