Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
filingDate |
2008-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f73bae8d51cff769ad23a2ffee036378 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_421de8a7ac25307ee1b7ecb7b512306a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35e1c4941fb97335a7e6e4f30b2e2263 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d352978bcd5077268ace6d2b84123ed |
publicationDate |
2008-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-200845212-A |
titleOfInvention |
Activated chemical process for enhancing material properties of dielectric films |
abstract |
A method for restoring a dielectric constant of a layer of a silicon-containing dielectric material having a first dielectric constant and at least one surface, wherein the first dielectric constant of the layer of silicon-containing dielectric material has increased to a second dielectric constant, the method comprising the steps of: contacting the at least one surface of the layer of silicon-containing dielectric material with a silicon-containing fluid; and exposing the at least one surface of the layer of silicon-containing dielectric material to an energy source selected from the group consisting of: UV radiation, heat, and an electron beam, wherein the layer of silicon-containing dielectric material has a third dielectric constant that is lower than the second dielectric constant after exposing the layer of silicon-containing dielectric material to the energy source. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9269652-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I600659-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I475712-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I565794-B |
priorityDate |
2007-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |