| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ced34b284868cee39b69d59fdafc19a7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-40 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0861
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-0738
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2008-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e309fc628af922e8cf7b27a49b0c116d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc8e71b7cbc16aea18cfb40c3e54b153
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3a827e0ffd6128f5bc2dbc8d767a59f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9ada8e78c5c87ba6672a6cac3cc003e |
| publicationDate |
2008-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200844678-A |
| titleOfInvention |
Laser machining apparatus |
| abstract |
A laser machining apparatus capable of accurately projecting mask patterns onto a work piece and superior in machining accuracy. An auto-focusing unit is provided. The auto-focusing unit includes a television camera for observing alignment marks formed on the surface of the work piece so as to be able to measure the focal length of a projection lens. A main-scanning direction expansion/contraction ratio Ex of the work piece to its design value and a sub-scanning direction expansion/contraction ratio Ey of the work piece to its design value are obtained. The imaging magnification M of the projection lens is corrected to compensate the expansion/contraction ratio Ex. The moving speed of a mask and/or the moving speed of the work piece are corrected in consideration of the imaging magnification M of the projection lens so as to compensate the expansion/contraction ratio Ey. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I510317-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I719306-B |
| priorityDate |
2007-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |