http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200844522-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-122
filingDate 2007-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8cd83e8de7526eb0307e50d46d19979
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publicationDate 2008-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200844522-A
titleOfInvention A mothod of fabricating polymer waveguides by soft-lithography
abstract This invention proposed a soft-lithography method to replicate polymer waveguides. The waveguides are fabricated by a two-step molding process where a master mold is first formed on a negative photoresist and subsequently transferred to a polydimethysiloxane (PDMS) mode; a PDMS silicone rubber mold is then used as a stamp to transfer the final waveguide pattern onto a UV cure epoxy. The invention to fabricate polymer waveguides has the following advantages: (1) good pattern transferring in physical shape, (2) low propagation loss in waveguiding properties, (3) low cost and potential for mass production. This method can be applied in the fabrication fields of integrated-optics or optical guided-wave devices and chips.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I461773-B
priorityDate 2007-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 20.