| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C43-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C39-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-712
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C39-17 |
| filingDate |
2008-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_381de81b1f3fad7df1c4007aacaa45f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27ce997496ad602504ce5bcdd2f965aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_108d1bb75db5370aede685b3152590f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d0eec37fb082c5a7f689be97b0429e0 |
| publicationDate |
2008-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200838839-A |
| titleOfInvention |
Compound and radiation-sensitive compositions |
| abstract |
Disclosed is a compound represented by the general formula (1) below, which is a raw material for a radiation-sensitive composition capable of forming a resist film which is effectively sensitive to an electron beam and the like and excellent in low roughness and the like, while being capable of stably forming a fine pattern with high precision. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I697735-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11204552-B2 |
| priorityDate |
2007-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |