http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200837212-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed89ca88042d3b6f7afc21d7b6dd7b87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a864329f69db5da3ce856121f76fe371 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate | 2007-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_495b6be1c2fb0b81d916b8ab14218638 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6915b13916a963a02df7f9ce86b49771 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cef229b24fe9069ae413ca54b17c0e6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56113b29aa41f2dd0db8b75ee067ddc0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f522b11e0de3235c1f668e820104a9f5 |
| publicationDate | 2008-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200837212-A |
| titleOfInvention | Technique for atomic layer deposition |
| abstract | A technique for atomic layer deposition is disclosed. In one particular exemplary embodiment, the technique may be realized by an apparatus for atomic layer deposition. The apparatus may comprise a process chamber having a substrate platform to hold at least one substrate. The apparatus may also comprise a supply of a precursor substance, wherein the precursor substance comprises atoms of at least one first species and atoms of at least one second species, and wherein the supply provides the precursor substance to saturate a surface of the at least one substrate. The apparatus may further comprise a plasma source of metastable atoms of at least one third species, wherein the metabstable atoms are capable of desorbing the atoms of the at least one second species from the saturated surface of the at least one substrate to form one or more atomic layers of the at least one first species. |
| priorityDate | 2007-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 68.