http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200836242-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2d32a1324eb3a240649ffee8d475d63 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 2007-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b1dd2be2cf235f80fc10d90c1e975db http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24ee54debb631e3eaf3b8d68eea06a4c |
| publicationDate | 2008-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200836242-A |
| titleOfInvention | Method for forming ring pattern |
| abstract | A method for forming a ring pattern is disclosed. The ring pattern has a first wall and a second wall. The method includes the following steps: (a) providing a substrate; (b) forming a dielectric layer on the substrate; (c) forming a first patterned photo resist on the dielectric layer, the first patterned photo resist defining the first wall; (d) etching a portion of the dielectric layer unprotected by the first patterned photo resist to a predetermined depth, and then removing the first patterned photo resist; (e) forming a second patterned photo resist on the dielectric layer, the second patterned photo resist defining the second wall; (f) etching a portion of the dielectric layer unprotected by the second patterned photo resist, and then removing the second patterned photo resist to form the ring pattern having the first wall and the second wall. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10832910-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10312086-B2 |
| priorityDate | 2007-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.