| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7442b6cce4e96d3dc4a380851e9224d8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76849 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2007-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8184d4063b2a6c7372dca19832dca0aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_569a6aba8389871943a10d904c5b1abe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09583e3dc5c1130a22d238c832f50c82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_726fac005b46c3a281a140dcb4311a2e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d02ad4910e15a94c4262dff734bef1ca |
| publicationDate |
2008-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200835804-A |
| titleOfInvention |
Manufacture of electroless cobalt deposition compositions for microelectronics applications |
| abstract |
A method of preparing an aqueous electroless deposition composition for electrolessly depositing Co or a Co alloy onto a substrate in manufacture of microelectronic devices by treating a composition comprising water or an aqueous electroless deposition composition with a deoxygenating treatment to reduce the oxygen concentration. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9136794-B2 |
| priorityDate |
2006-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |