| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2007-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2853785904ccf0ca690971f74235e0ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b647cf547306909088a5103a6d3e2ebb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a58ac696a2b0efc43ce32536e9b4e708 |
| publicationDate |
2008-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200832521-A |
| titleOfInvention |
Method of vaporizing solid organometallic compound |
| abstract |
A method of vaporizing a solid organometallic compound in which the method comprises filling the solid organometallic compound into a container, introducing a carrier gas to the container and taking out the gas containing the organometallic compound, wherein the solid organometallic compound is in the form of pellets and contains an inert support. |
| priorityDate |
2006-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |