http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200828511-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_06fe7d765c51e6c31790bda5412bc149 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 |
filingDate | 2006-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b333114da881512f4d595bf1ec0002d2 |
publicationDate | 2008-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-200828511-A |
titleOfInvention | Structure of capacitor and the manufacturing method thereof |
abstract | The present invention discloses a structure of capacitor and the manufacturing method thereof. The structure of capacitor is formed with a T character shape. It can separate the dielectric layer with high dielectric constant and the inserting plugs by using effectively the spreading hinder layer and the lower electrode layer, prevent the oxygen containing composition in the dielectric layer with high dielectric constant from spreading into the inserting plugs to bring about the status of oxidation, increase the application of the dielectric layer with high dielectric constant in manufacturing process, and also improve largely the yield of capacitor component by using the dielectric material with high dielectric constant. |
priorityDate | 2006-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.