| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aafe0172ffd94d3486c518b0709bb2b3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2007-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c38746563dcdc6eaace72b142443bd17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b11908470faed23161ad389527b102cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e3cdbba8a261e12da28881039f03d00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6077b0ea83ce4268f4377fb514e5fce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d08ecde4b8d809ea5e8d937b68fd9c2d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85c4967299aec470e74a3d14128aa65c |
| publicationDate |
2008-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200827928-A |
| titleOfInvention |
Novel organosilane polymer, hardmask composition for processing resist underlayer film comprising the organosilane polymer, and process for producing semiconductor integrated circuit device using the hardmask composition |
| abstract |
A hardmask composition for processing a resist underlayer film is provided. The hardmask composition comprises: (a) an organosilane polymer prepared by reacting polycondensation products of hydrolysates of compounds represented by Formulae 1, 2 and 3 with ethyl vinyl ether of Formula 4: [RO]3Si-Ar (1) (wherein R is methyl or ethyl and Ar is an aromatic ring-containing functional group), [RO]3Si-H (2) (wherein R is methyl or ethyl), and [RO]3Si-R' (3) (wherein R is methyl or ethyl and R' is substituted or unsubstituted cyclic or acyclic alkyl) CH2CHOCH2CH3; (4) (b) a solvent; and (c) a crosslinking catalyst. |
| priorityDate |
2006-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |