http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200818514-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_72ed91cb20a3ca510bb7e85d7fae504a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-788 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8247 |
| filingDate | 2006-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebf13ce3d7be1581f3b4dd50a4a3b12a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7df551a893c77b85be645e1d0b915205 |
| publicationDate | 2008-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200818514-A |
| titleOfInvention | Non-volatile memory with isolation structure and method of manufacturing the same |
| abstract | A method of manufacturing non-volatile memory is described. First, a substrate is provided, wherein plural isolation structures are formed thereon and adjacent two isolation structures define an active region. The top surfaces of these isolation structures are higher than that of the substrate. Then, plural openings are formed in the substrate of each active region. Plural floating gates are formed on the sidewalls of each opening, wherein the top of the floating gate is lower than the surface of the isolation structure but higher than the surface of the substrate. Next, plural source lines are formed on the substrate in the bottom of the opening. The source lines are adjacent to the floating gates and across the isolation structures. And portions of the isolation structures outside the source lines are removed. And plural word lines are formed on the substrate outside the source lines. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10483271-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I669805-B |
| priorityDate | 2006-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.