http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200817094-A

Outgoing Links

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d71bfbdf165428f98bc5cf14bbc264e9
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B15-12
filingDate 2007-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a588f09d02646f2f2cbac52b32a9246e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eef4b0a8ca333f4966f5019854525715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6052d96c8f7538cd701a600d0f61f729
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publicationDate 2008-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200817094-A
titleOfInvention Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
abstract The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.
priorityDate 2006-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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Total number of triples: 23.