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publicationDate 2008-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200814312-A
titleOfInvention Semiconductor device with reliable high-voltage gate oxide and method of manufacture thereof
abstract A semiconductor device including a capacitor and a proximate high-voltage gate having a boron-barrier layer that ideally serves as part of both the capacitor dielectric and the (high voltage) HV gate oxide. The boron-barrier layer is preferably formed over a poly oxide layer that is in turn deposited on a substrate infused to create a neighboring wells, and N-well over which the capacitor will be formed, and P-well to be overlaid by the HV gate. The boron-barrier helps to reduced or eliminate the harmful effects of boron diffusion from the P-well during TEOS deposition of the gate oxide material.
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