| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc905cbef116a1ec61d12125af9427f3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02647
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0237 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2006-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_201dcf0486a6503bd17687c8f62fffa8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6535da0293ad6a54065fc4edc3b6359f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0eb143343486772a62edca6f0431e33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20a448cb8bc6756901d6fda94b55663a |
| publicationDate |
2008-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200814148-A |
| titleOfInvention |
Nitride semiconductor and method for forming the same |
| abstract |
A method for forming a nitride semiconductor substrate is provided. The method comprises steps of providing a substrate and forming an epitaxy layer on the substrate. A patterned mask layer is formed on the epitaxy layer to expose a portion of the epitaxy layer. Then, an oxidation process is performed to completely oxidize the exposed portion of the epitaxy layer so as to form several dislocation blocking structures. The patterned mask layer is removed. Next, a nitride semiconductor layer is formed on the epitaxy layer having the dislocation blocking structures therein. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8501582-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I414085-B |
| priorityDate |
2006-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |