http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200811276-A

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filingDate 2007-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2008-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200811276-A
titleOfInvention Polishing composition containing polyether amine
abstract The inventive chemical-mechanical polishing system comprises a polishing component, a liquid carrier, and a polyether amine. The inventive method comprises chemically-mechanically polishing a substrate with the aforementioned polishing system.
priorityDate 2006-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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