| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0338
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2007-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eee565e0921f3f7c3d4efebf21724b53 |
| publicationDate |
2008-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200809921-A |
| titleOfInvention |
Method of lithography patterning |
| abstract |
A method of lithography patterning includes forming a first material layer on a substrate; forming a first patterned resist including at least one opening therein on the first material layer; forming a second material layer on the first patterned resist layer and the first material layer; forming a second patterned resist layer including at least one opening therein on the second material layer; and etching the first and second material layers uncovered by the first and second patterned resist layers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8529778-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I474204-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8828297-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I575569-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9543159-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8343871-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106019849-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I570975-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I453106-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106019849-A |
| priorityDate |
2006-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |