| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_69a4ae662cd6a46490ee45a70e85dc39 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26586
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823412 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate |
2007-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_440fcc781ba16479a9cc5ec6b8e8f07c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e90ba3a8e1a77b46bb07fbfd6659204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ba3b51cea7caa5e31e3b85c84f67480
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35a4b3bbe0a024eb180ac6fcdded3509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c487996c0242ef2900ebd8d846ef3a31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_642b43683d7c0d79629b5025980a7156 |
| publicationDate |
2008-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200807574-A |
| titleOfInvention |
Method of forming an integrated circuit |
| abstract |
A method of forming an integrated circuit includes: defining a plurality of protruding portions on a semiconductor substrate surface, the protruding portions having a minimum height; providing a pattern layer above the substrate surface; removing portions of the pattern layer from predetermined substrate portions; performing an ion implantation procedure such that an angle of the ions with respect to the substrate surface is less than 90 DEG, wherein the ions are stopped by the pattern layer and by the protruding portions, the predetermined substrate portions thereby being doped with the ions; and removing the pattern layer. |
| priorityDate |
2006-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |