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publicationDate 2008-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200805455-A
titleOfInvention Group III-V nitride layer and method for producing the same
abstract A hexagonal system group III-V nitride layer having high quality crystallinity capable of enhancing the characteristics of a semiconductor device such as a light emitting element. The group III-V nitride layer belonging to hexagonal system formed by growing on a substrate having a different lattice constant has a growth face orientation of {1-100}, wherein the full width at half maximum b1 of angle dependency of X ray diffraction strength on a {1-210} face normal to the growth face orientation upon X ray incident from a direction parallel with the growth face satisfies a relation 0.01 DEG ≤ b1 ≤ 0.5 DEG , or the full width at half maximum b2 of angle dependency of X ray diffraction strength on a {0001} face upon X ray incident from a direction parallel with the growth face satisfies a relation 0.01 DEG ≤ b2 ≤ 0.5 DEG .
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