| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d9f3ca41550d315642580237250c5b0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-146 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2007-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67807e05e7ac9ebb96afbbd6f2abeca4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36abd6928a445e84208b7a155b25f30d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_699003fbdf83c4a04492281ae2cacd0f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6a199f03dee5f5f8f88abcc182e5c0b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bd9a086f06a22943b7555be08d0f40c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33546ab504615a86e79f3090e07ba5d6 |
| publicationDate |
2008-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200805001-A |
| titleOfInvention |
Laser ablation resist |
| abstract |
A method of making micro-structure devices by coating a first layer of resist (12) on a substrate (10). A pattern is created on the substrate by radiation induced thermal removal of the resist. |
| priorityDate |
2006-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |