http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200804831-A

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publicationDate 2008-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200804831-A
titleOfInvention Probe card
abstract Provided is a probe card capable of easily attaining increase of rigidity of space transformer with low cost. For this purpose, the probe card of the present invention includes a plate-shaped wiring substrate 11 having a wiring pattern corresponding to a circuit structure for generating detection signals, an interposer 13 superimposed on the wiring substrate 11 and relaying the wirings of thw wiring substrate 11, a space transformer 14 superimposed on the interposer 13 and fixed by an adhesive 19, to convert intervals of the wirings relayed by the interposer 13 and render the wiring expose from a surface opposite to a surface opposing to the interposer 13, and a probe head 15 superimposed on the space transformer 14 and accommodating a plurality of probes.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I409465-B
priorityDate 2006-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 25.