Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_399d433982220f3203f7f18db8c9aa28 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06722 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07378 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2889 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
filingDate |
2007-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28fee8eb4e4dd3523026bfd9b8d1386d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cc02385af1240cb481968e9940879e2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fda2ebc0ac3dcc1f251082af3780f4a5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1496cd256f7c84d0572cdc7b1df34c75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d548a583eab00f7a4ace3c28d577fa47 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cdc815188f0c54e97833c2f46ffed4ac |
publicationDate |
2008-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-200804831-A |
titleOfInvention |
Probe card |
abstract |
Provided is a probe card capable of easily attaining increase of rigidity of space transformer with low cost. For this purpose, the probe card of the present invention includes a plate-shaped wiring substrate 11 having a wiring pattern corresponding to a circuit structure for generating detection signals, an interposer 13 superimposed on the wiring substrate 11 and relaying the wirings of thw wiring substrate 11, a space transformer 14 superimposed on the interposer 13 and fixed by an adhesive 19, to convert intervals of the wirings relayed by the interposer 13 and render the wiring expose from a surface opposite to a surface opposing to the interposer 13, and a probe head 15 superimposed on the space transformer 14 and accommodating a plurality of probes. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I409465-B |
priorityDate |
2006-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |