| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc3e639586089fe232d0cfb27383c875 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249921
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249953 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02348
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
2007-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ddd3c133d45d55323382b798b4023b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0940c28a7a30d9f2ee4eb4643b2732c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6be95ccf814431ee49682af041fb744
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f79862b17d29bbe9ef835281243a0855 |
| publicationDate |
2008-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200804523-A |
| titleOfInvention |
Precursor composition for porous membrane, process for preparation of the precursor composition, porous membrane, process for production of the porous membrane, and semiconductor device |
| abstract |
Disclosed is a precursor composition comprising: a compound selected from a compound represented by the formula: Si(OR1)4 and a compound represented by the formula: Ra(Si)(OR2)4-a (in the formulae, R1 represents a univalent organic group; R represents a hydrogen atom, a fluorine atom or a univalent organic group; R2 represents a univalent organic group; and a represents an integer ranging from 1 to 3, provided that R, R1 and R2 are the same as or different from one another); a thermally degradable organic compound; an element having a catalytic activity; urea; and the like. A porous membrane produced from the precursor composition is irradiated with ultraviolet ray, and then subjected to gas-phase reaction with a hydrophobic compound. A porous membrane thus prepared can be used for the manufacture of a semiconductor device. |
| priorityDate |
2006-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |