http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200801816-A

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filingDate 2007-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_519d9072080f85557904e9c750743a5a
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publicationDate 2008-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200801816-A
titleOfInvention Photosensitive resin composition
abstract A photosensitive resin composition which is useful especially as a buffer coating material for LSI chips; and a resin film obtained from the photosensitive resin composition. The photosensitive resin composition comprises: 100 parts by weight of a polycondensate obtained by condensation-polymerizing compounds represented by specific chemical formulae in a specific proportion; 0.01-5 parts by weight of a photopolymerization initiator; and 1-30 parts by weight of a specific organosilane. The resin film is obtained by applying the photosensitive resin composition to a silicon wafer surface and subjecting the coating to exposure to light, development, and curing.
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Total number of triples: 27.