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filingDate 2006-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2007-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200739767-A
titleOfInvention Methods for forming a solder bump on a bond pad and an interconnection structure for a semiconductor device
abstract An under bump metallurgy (UBM) structure formed over a bond pad and for use in conjunction with a solder ball, provides an upper copper layer over a subjacent composite film that includes a nickel film over a further copper film over a titanium film. One or more reflow operations are used to form a molten solder ball and conditions are selected to ensure that all the copper from the upper copper layer is dissolved within the molten solder ball. For SnAg leadfree solder, this leads to the formation of SnAgCu-like leadfree solder. The resulting interface between the solder ball and the nickel layer includes regularly spaced Cu6Sn5 nodules as intermetallics but is free of Ni3Sn4 which can spall into the molten solder causing reliability problems.
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