| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24413 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C24-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-04 |
| filingDate |
2006-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44a46541549e596c55a86a04c3e9c742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_918fa77202a97c9fcc5c2e106e9800f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1985a0897cf38ca28dccddae6a8fbcad |
| publicationDate |
2007-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200728501-A |
| titleOfInvention |
Corrosion resistant member |
| abstract |
This invention provides a corrosion resistant member which is a material that is exposed to a chlorine-containing gas or chlorine plasma environment. The material is featured in that the material surface will not absorb moisture even in ambient atmosphere after the material is exposed to chlorine-containing gas or chlorine plasma environment. The surface of the corrosion resistant member that is exposed to a chlorine-containing gas or a chlorine plasma does not form chloride particles of the substrate material. After washing of the member with water, the wash liquid does no show any indication of corrosive nature to the substrate. The member is therefore free of damage to the substrate and is corrosion resistant. |
| priorityDate |
2005-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |