| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_34f753cba15ccfc6a0cc84564aa01546 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G65-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G65-332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J5-18 |
| filingDate |
2005-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8eea9bbfefea16eea2ac2ef78fe77347
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15de5d3f5a1812bb04fb3183bb7f72c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11bae3946f59a898b20490c4ef0b10ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b5f00b23c82b86e60b762d3d97c1f1b |
| publicationDate |
2006-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200622501-A |
| titleOfInvention |
Polymer for forming anti-reflective coating layer |
| abstract |
A polymer for forming an organic anti-reflective coating layer between an etching layer and a photoresist layer to absorb an exposure light in a photolithography process and a composition comprising the same are disclosed. The polymer for forming an organic anti-reflective coating layer has a repeating unit represented by or wherein, R1 is hydrogen or methyl group, and Rs is a substituted or non-substituted alky group of C1 to C5. The composition for forming the organic anti-reflective coating layer includes the polymer having the repeating unit represented by above Formulas; a light absorber; and a solvent. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115873176-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115873176-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I475326-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115873175-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115873175-A |
| priorityDate |
2004-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |