http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200602301-A

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filingDate 2005-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bd5be9be9815b72cbd96780937bd39d
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publicationDate 2006-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200602301-A
titleOfInvention Fluorine-containing cyclic compound, fluorine-containing polymer compound, resist material using same and method for forming pattern
abstract Disclosed is a fluorine-containing cyclic compound represented by the general formula (1) below. R1a represents a cyclic alkyl group having 1-25 carbon atoms, a cyclic alkenyl group or a cyclic alkynyl group; and R2 and R3 independently represent a hydrogen atom, a halogen atom or a straight-chain, branched-chain or cyclic alkyl group having 1-25 carbon atoms. R1a, R2 and R3 may independently include a fluorine atom, an oxygen atom, a sulfur atom, a nitrogen atom or an atomic group having a carbon-carbon double bond.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9678426-B2
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priorityDate 2004-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 53.