http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200540429-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0735 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 2005-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78ea0951a50c518406bf4bef4bd6e4b8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_229fdfa766d6365a3be06b87b7224ae0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eda55fadd87e692b2caf6fb4f72eb627 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_346643f4b2653f636b9da240c5193618 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d05f8f6645abaaa0bafde73e6467239b |
| publicationDate | 2005-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200540429-A |
| titleOfInvention | Sheet-shaped probe, manufacturing method thereof and application thereof |
| abstract | A sheet-shaped probe, a method for manufacturing the probe and application of the probe are provided, by which a small-diameter surface electrode part can be formed, a stable connecting status can be attained even for a circuit device having a small-pitch electrode, a high durability can be obtained by preventing an electrode structure from dropping from an insulating film, a positional shift of the electrode structure from an electrode to be inspected due to temperature change in a burn-in test can be surely prevented for large-area wafers and the circuit devices having the small-pitch electrode to be tested, and excellent connecting status can be stably maintained. The sheet-shaped probe is provided with a contact point film having an insulating film and a plurality of the electrode structures extending in a thickness direction of the insulating film, and a supporting film made of a metal for supporting the contact point film. The electrode structure is composed of the front surface electrode part protruding from a front surface of the insulating film, a rear surface electrode part exposing on a rear surface of the insulating film, a short-circuiting part which extends continuously from a base edge of the front surface electrode part in the thickness direction of the insulating film and is connected to the rear surface electrode part, and a supporting part which extends continuously outward from the base edge part of the front surface electrode part along the front surface of the insulating film. |
| priorityDate | 2004-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.