| abstract |
To provide a manufacturing device of an in-line type electroluminescent element with improved film-forming quality and high production efficiency. In the manufacturing device of the in-line type organic electroluminescent element, a holder integrated with a mask is used to retain a substrate, to which a cooling plate is fitted to suppress temperature rise of the substrate and continuous conveyance is carried out. Further, a structure is realized in which the substrate is continuously conveyed without stop between treatment rooms of different degrees of vacuum, with differential exhaust parts D1 to D4 provided inside the device. |