http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200539335-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f063b8222ec3c8e746a415e7f364473 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-16 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 |
| filingDate | 2004-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_824fdc8fb912da20bcbc13f4cb156fbd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfc90a38b3fde32b24a378e964a001a5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_122048231c6567b4fe9bcda110db2dc8 |
| publicationDate | 2005-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200539335-A |
| titleOfInvention | Torque-based end point detection methods for chemical mechanical polishing tool which uses ceria-based CMP slurry to polish to protective pad layer |
| abstract | A chemical mechanical polishing (CMP) method is disclosed in which a torque-based end-point algorithm is used to determine when polishing should be stopped. The end-point algorithm is applicable to situations where a ceria (CeO2) based CMP slurry is used for further polishing, pre-patterned and pre-polished workpieces (e.g., HDP-oxide) and a comparatively, lower friction and underlying layer of sacrificial pads (e.g., silicon nitride pads). A mass production wise, reliable and consistent signature point in the friction versus time waveform of a torque-representing signal is found and used to trigger an empirically specified duration of overpolish. A database maybe used to define the overpolish time as a function of one or more relevant parameters. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113659958-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I801146-B |
| priorityDate | 2004-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.