| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J5-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3121
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-14 |
| filingDate |
2005-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fa294e0d06fc662543460e42ed5c639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9dda10a0dfb0879bc0808df5632c0e25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb0045d24003e2a9c6df126e51068ac8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14e72452304c1b9b5685afc273d05e8b |
| publicationDate |
2005-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200536621-A |
| titleOfInvention |
Method for producing polymer, polymer, composition for forming insulating film, method for producing insulating film, and insulating film |
| abstract |
This invention forms insulating membrane layer which is suitable used in semiconductor components. The dielectric constant is small, mechanical intensity and dense connecting is superior for this insulating membrane layer. Disclosed is a method for producing a polymer including hydrolysis-condensation of a silane monomer (B) containing a hydrolyzable group in the presence of one or more polycarbosilanes (A) wherein at least one of the polycarbosilanes (A) is a polycarbosilane (I) as defined below. A polycarbosilane (I) is obtained by reacting a compound represented by the general formula (1) below in the presence of at least one of an alkali metal and an alkaline earth metal, and has a weight average molecular weight of not less than 500. R1mY3-mSiCR2nX3-n (1) (In the formula, R1 and R2 may be the same or different and respectively represent a monovalent organic group or a hydrogen atom; X represents a halogen atom; Y represents a halogen atom or an alkoxy group; k represents an integer of 0-3; and m and n may be the same or different and respectively represent an integer of 0-2.) |
| priorityDate |
2004-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |