http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200532000-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
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filingDate 2005-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_953fc1255eebb95e564f1a563326bfc2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d76ab8826973ec5388b03614683f8e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3590646e4766f076961330f8991890d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be2c1952c8adf91e551286146c61dfe9
publicationDate 2005-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200532000-A
titleOfInvention Multi-step polishing solution for chemical mechanical planarization
abstract The present invention provides a multi-step aqueous composition useful for polishing a tantalum barrier material and copper from a semiconductor wafer, comprising by weight percent 0.1 to 30 oxidizer, 0.01 to 3 inorganic salt or acid, 0.01 to 4 inhibitor, 0.1 to 30 abrasive, 0 to 15 complexing agent and balance water, wherein the aqueous composition has a pH between 1.5 to 6.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I779015-B
priorityDate 2004-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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