| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-30455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-30488 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-10 |
| filingDate |
2005-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67d06eac11e076d40c5a9b69bc4c2fc4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d632a8fb8d49ec1e9c8f320553049cb7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e73b79b61de5764acc0c71df90e7eb1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1ce54a2e60994382bab11302ff097f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2a90337c7a510963937009a1e9e508b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cec7fe93165164ae68192fb56646e81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe67ce2bc0ab95a799200f999b0a07af |
| publicationDate |
2005-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200529329-A |
| titleOfInvention |
Improvements relating to ion implantation |
| abstract |
This invention relates to a method of implanting ions in a substrate using an ion beam where instabilities in the ion beam may be present and to an ion implanter for use with such a method. This invention also relates to an ion source for generating an ion beam that can switched off rapidly. In essence, the invention provides a method of implanting ions comprising switching off the ion beam when an instability has been detected whilst continuing motion of the substrate relative to the ion beam to leave an unimplanted portion of a scan line across the substrate, establishing a stable ion beam once more and finishing the scan line by implanting the unimplanted portion of the path. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I450303-B |
| priorityDate |
2004-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |