http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200525660-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aee67fd4ed6f1faed77fe335893c02ae |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-16195 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48091 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56 |
filingDate | 2004-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c33f4446c7356440f919cf1838d7451 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63d9a2d069801febbf46945db66ad4f9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc1d6bb7ec4b72e003bc571573625ca5 |
publicationDate | 2005-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-200525660-A |
titleOfInvention | Upper object packaging method for backend process of image sensor |
abstract | The present invention relates to an upper object packaging method for backend process of image sensor, which includes using carbon dioxide to clean the surface of an image sensor object to be packaged in an inner environment with clean layer flow control; using two sets of visual systems to perform precise alignment on the surface of the upper object to be mounted; aligning and adhering the upper object to the image sensor object to be packaged at a predefined bonding position; and, after real-time pre-bake, pre-heat and alignment, completely securing the upper object onto the image sensor object to be packaged by thermal pressing means. Thus, it is able to ensure precise alignment and cleanness for packaging image sensors, and enhance the bonding strength of the product, thereby increasing the product yield of the packaging process. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I743429-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I605527-B |
priorityDate | 2004-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.