http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200523297-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1279 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-122 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 2004-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98348068fbed0016d4eddde7db78c587 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4169c9fc13e3bcc3271437fc9bce48a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5389dc5d38163550d989eec2917cb46c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12b887d0e7e67211ee6a63c64fd8c0ef |
| publicationDate | 2005-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200523297-A |
| titleOfInvention | Spin-on glass composition and method of forming silicon oxide layer in semiconductor manufacturing process using the same |
| abstract | A spin-on glass (SOG) composition and a method of forming a silicon oxide layer utilizing the SOG composition are disclosed. The method includes coating on a semiconductor substrate having a surface discontinuity, an SOG composition containing polysilazane having a compound of the formula -(SiH2NH)n- wherein n represents a positive integer, a weight average molecular weight within the range of about 3,300 to 3,700 to form a planar SOG layer. The SOG layer is converted to a silicon oxide layer with a planar surface by curing the SOG layer. Also disclosed is a semiconductor device made by the method. |
| priorityDate | 2003-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 61.