| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-19041 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-3192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53295
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02362
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-469
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate |
2004-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_acad4ae909676cc30968609bc74cb87d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef8e452f9dfef743451969e344f52e13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27d5e02520f3050ff3402fd7bc1a17f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_709c7bfb5c940e8b8df255bb8359ddcc |
| publicationDate |
2005-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-200522257-A |
| titleOfInvention |
Heterogeneous low k dielectric |
| abstract |
The present invention provides for a heterogeneous low k dielectric comprising a main layer and a sub-layer. The main layer comprises a first low k dielectric material with a first low k dielectric constant and the sub-layer comprises a second low k dielectric material with a second low k dielectric constant. The sub-layer directly adjoins the main layer, and the second low k dielectric constant is greater than the first low k dielectric constant by more than 0.1. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I677052-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11777035-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10269627-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10727350-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10840134-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10199500-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11374127-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11328952-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I625802-B |
| priorityDate |
2003-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |