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filingDate 2003-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa88239b831e33c8f78fb0848bee17c3
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publicationDate 2005-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200521086-A
titleOfInvention Process for removing organics from ultrapure water
abstract In order to reduce a total organic carbon (TOC) in ultrapure water to a level less than 1 ppb, several cycles of ozone contact/UV irradiation treatments are carried out in sequence. Preferably, the first cycle further includes an ion exchange treatment which is applied to the resulting UV irradiation water.
priorityDate 2003-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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