| abstract |
To improve the problems of the flaky coating mottle and protrusion on the terminated part of the substrate together plate took place at coating the sensitive resin composition on the large substrate plate. The present invention relates a sensitive resin composition comprising the alkali soluble resin of the Novolak resin etc. and the naphthoquinonediazido group-containing sensitizer, comprises 50 to 5,000ppm silicone oil represented as the below formula base on the all solid component of the sensitive resin component. (wherein, R1, R2, R3, R4, R5 and R6 each represents independent hydrogen, hydroxyl, C1 to 4 alkyl, or aryl, m represent the integer number range of 1 to 40, n represent the integer number range of 1 to 4). |