http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-200427494-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_10fd97819e2a8e4187133140dbb4bc0f |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06Q50-12 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04B5-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-46 |
| filingDate | 2004-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_191c62580162a835ce55545d402c9300 |
| publicationDate | 2004-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-200427494-A |
| titleOfInvention | Method of recycling used etchant containing phosphoric acid |
| abstract | The present invention discloses a method of recycling a used etchant containing phosphoric acid generated during the manufacture process of a semiconductor, a TFT-LCD (Thin Film Transistor-Liquid Crystal Display), etc. The method comprises the step of electrochemically activating a diluent (phosphoric aqueous solution), which is made by diluting with a distilled water a distilled filtrate (phosphoric acid having a high concentration) obtained by the reduced pressure distillation of the used etchant containing phosphoric acid, by an electrical energy before treating the diluent with cation exchange resin. The present invention can recover phosphoric acid of high purity by removing 99.9% of metal ion melted in a used etchant containing phosphoric acid, and can continually recycle a used etchant containing phosphoric acid by reconstituting an etchant containing phosphoric acid by using the recovered phosphoric acid of high purity. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103979509-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103979509-B |
| priorityDate | 2003-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.